Exposure machine operation precautions and procedures

An ultraviolet exposure machine is a machine device that emits ultraviolet light of a UVA wavelength by turning on a light to transfer image information on a film or other transparent body to a surface coated with a photosensitive material.

Under the control of the computer, the exposed electron beam is used to expose the organic polymer (commonly referred to as the electronic resist or photoresist), and the physical and chemical properties of the photoresist after being irradiated by the electron beam are changed. The solvent forms a good or non-solatable region in the solvent, thereby forming a fine pattern on the resist.

More wide range (UV, DUV, NUV) wavelength selection of ultraviolet light, intensity range of emitted light: 8mW/cm2~40mW/cm2.

Supports constant light or constant power mode.

Widely used in semiconductor, microelectronics, biological devices and nanotechnology leaders.

Examples of common exposure machines: NCO's UV exposure system, manufactured by MYCRO USA, is suitable for UV or deep UV exposures from special-sized substrates to a wide range of 4-dimensional materials. The NXQ400-6 system has been successfully used in semiconductor manufacturing, optoelectronics, flat panels, RF microwaves, diffractive optics, MEMS, bumps or flip chips and other applications that require fine print and precision alignment.

I. Precautions before starting up:

1. Check whether the airtight pressure regulating valve, the auxiliary cylinder pressure valve, the lamp air flow meter display are normal, and whether the photoelectric buttons are sensitive;

2. Check whether the water level of the ice water tank is within the limit range; whether the status of the water pump power switch or vacuum power switch is normal or not;

3, check the machine table, exposure box (outside), track trunking, drive belt whether there is foreign matter or plug.

Second, the operation notes:

1, the boot process: the main power room ice water machine cooling fan lights;

2. Check whether the ice machine is turned on after the machine is turned on, and whether the upper (lower) water jacket is normal;

3. After the lamp reaches a steady state, the current and voltage reach the normal value;

4. If there is water stoppage, the production shall be stopped immediately, the light tube shall be extinguished, and maintenance inspection shall be carried out;

5, if the stop immediately shut down the main power;

6. When an abnormality occurs in the exposure lamp, it must be stopped and replaced by a short circuit.

7. If there is an emergency, press the "emergency stop button" and then close the device. After the emergency is completed, turn on the machine according to the boot process.

8. The new employee (without employment permit) cannot work alone and must be instructed by counselors on the spot.

Third, shut down matters needing attention

1. Before shutting down, first confirm whether the lamp is in the off state;

2. Do not close the ice water pump immediately after turning off the lights. Wait 15 minutes. The ice pump can be turned off after cooling the lamp.

3, confirm whether the exposure frame is closed;

4. Check whether the condensate at the rear of the machine is full. And clean up the condensate in the bucket;

5, do a good job "6S" work area.

Fourth, maintenance and precautions:

1. When performing maintenance work, the exposure machine must be kept in a stopped state;

2. When carrying out repairs and maintenance operations, necessary protective equipment must be worn;

3, machine equipment maintenance, should be posted at the boot button "machine maintenance, do not start" and other signs;

4. In the maintenance of machinery and equipment, other personnel are prohibited from operating the computer software;

5. During maintenance, check the pressure and airtightness of the cylinder and whether the water tank is leaking or blocked;

6, check the slide rails and slider lubricity;

7. Check whether the power wiring connection of each part is loose or not;

8, check the lamp socket connection is loose or poor contact.

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