MEMS is the abbreviation of English Micro Electro Mechanical systems, namely microelectromechanical systems. Microelectromechanical systems (MEMS) technology is a 21st century cutting-edge technology based on micro/nanotechnology. It refers to the technology of designing, processing, manufacturing, measuring and controlling micro/nano materials. It integrates mechanical components, optical systems, drive components, and electronic control systems into a single unitary micro system. Such a microelectromechanical system is capable of not only acquiring, processing and transmitting information or instructions, but also acting autonomously or according to external instructions in accordance with the acquired information. It uses a combination of microelectronics and micromachining technology (including silicon micromachining, silicon surface micromachining, LIGA and wafer bonding) to create a variety of high performance, low cost, miniaturized sensors. Actuators, drives, and microsystems. Microelectromechanical systems (MEMS) are a new multidisciplinary technology developed in recent years that will revolutionize human life in the future. It involves many disciplines such as mechanics, electronics, chemistry, physics, optics, biology, and materials.
MEMS pressure sensors are miniature electromechanical systems with power supplies, interface circuits, actuators, miniature sensors and signal processing. It can be used in production processes and circuit design for high-volume production with low cost and high precision. In fact, when the metal elastic body is deformed by an external force, it undergoes elastic deformation of the mechanical quantity and then outputs after the power is converted. Therefore, the MEMS pressure sensor has many advantages and is very large in size. Small, cost-effective. It is mainly divided into two types: silicon capacitor type and silicon piezoresistive type.
According to the related technology of MEMS, the shape of the capacitive sensor is made into a horizontal grid, and the two horizontal barriers on the lower side can form a group of sensors. When the upper grille is under pressure, it will move downwards. Then, the distance between the two horizontal grilles above and below will change. In other words, the capacitance between the plates will be changed. A change has occurred. The silicon piezoresistive pressure sensor uses a highly precise semiconductor resistance strain gauge to form a Huygens bridge, so that it can be used as a force-electric conversion to measure the relevant circuit. It has lower cost, lower power consumption, and higher precision of measurement. This kind of sensor, if the pressure does not change, its output is zero, so almost no power is required.
The MEMS silicon piezoresistive pressure sensor is applied to the inner wall of a fixed, circular cup of stress-bearing silicon film. At the same time, using MEMS technology, four high-precision semiconductor strain gauges can be directly engraved directly. It is the place where the surface stress is the largest, so that the Huygens bridge can be formed, so that the circuit can be measured as a force-electric conversion, which is measured by directly converting the pressure into electricity.
MEMS pressure sensors are used in a wide range of applications: industrial electronics, industrial batch weighing, digital flow meters, and digital pressure gauges. Consumer Electronics: Liquid level control pressure sensors for solar water heaters, dishwashers, water dispensers, washing machines, air conditioning pressure sensors, microwave ovens, health scales, and sphygmomanometers. Automotive electronics: Common rail pressure sensors for diesel engines, intake manifold pressure sensors for automotive engines, air pressure sensors for automotive brake systems, and engine oil pressure sensors.
Many of the processes of four-inch circular wafers in many integrated circuits are now produced by MENS. But it must be added to the unique equipment of the three MEMS process: bonding machine, double-sided lithography machine and wet etching table. For pressure sensor manufacturers, it is important to add standard pressure testing equipment that is very expensive. And MEMS manufacturers, they need to develop channels and sales experience in the field of consumer electronics and automotive electronics. Especially for automotive electronics, it is more important for MEMS pressure sensors, and its demand has increased rapidly in recent years. For example, Jebsen Electronics has reached 200 to 3 million per year. With the advancement of technology, the demand for MEMS pressure sensors in the market will become larger and larger, and its development prospects are extremely broad.
Oled Display Module,Segment Led Display Module,Module Pcb Oled Display,Oled Display Micro
Shenzhen Newvision Technology Co.Ltd , https://www.newvisionlcd.com